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Laser applications on thin film solar cells
Selective ablation
Thin film solar cells are produced through a sequence of vapor deposition
and scribing processes. The integrated circuits are generated between the
different deposition steps by selective ablation of single layers to achieve
electrical isolation. Best beam quality lasers (TEM00) with very high repetition
rates of up to 200 kHz are used to ablate 10-50 μm wide lines at scribing
speeds of up to 2000 mm/s, without damaging the glass substrate or layers
underneath. Thus, Nd:Vanadate lasers with short ns-pulse duration (up to
100 ns) are the standard laser type for this kind of application. The optimum
wavelength for the various processes depends on the type of layer.
Fundamental (1064nm) and second-harmonic (532nm) and
third-harmonic (355nm) wavelength are commonly
used in the production of a-Si, CIS and CdS/CdTe solar
cells.
Edge deletion
For electrical isolation and hermetic sealing of the module, the complete
removal of all layers from the edges of fully processed thin film solar cells on
glass substrates is required. In order to meet production requirements, removal
rates have to be high (up to 50 cm2/s). Here, the laser challenges
conventional techniques, like sand blasting and grinding.
Since standard TEM00-lasers (like Nd:Vanadate lasers used for scribing) do
not provide sufficient ablation rates for this application, especially developed
high-power qs-lasers are applied. Those diode-pumped Nd:YAG lasers generate an average power of up to 850 Watt at 30 kHz which is guided
through a 600μm step-index fiber, in order to produce a homogenous, flat-top
intensity profile. Typical ablation widths are between 0.7 and 1.5 mm at
processing speeds of up to 6000 mm/s.
Square Fibers
As the nature of the process is a shot by shot
application a square spot geometry has the advantage,
that the overlapping of several pulses is constant across
the processing direction. Square homogeneous spots
are offered by square fibers. Processing with square homogeneous spots
from square fibers allows the optimisation of removal
applications (size 1.2mm).
Overlapping of pulses is realized by a displacement of
subsequent pulses less then one spot width. Square
pulses have the advantage that the overlap is constant
from the centre of the spot to the edge. Efficient and
homogeneous removal results are achieved easily. |
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